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Series  150   Gate valve particle free Area of application: For applications where low particle count and low shock impact are a must. Often used in R&D, but also in semiconductor process systems. Description: These gate valves are well suited for vacuum systems requiring extremely low particle count and virtually shock-free operation. Modular design: configurable for vacuum, high vacuum, corrosive processes, etc. Nominal inside diameters (ID): 63 (2 1/2") - 160 (6" ) Body material: Aluminum Actuator types: Pneumatic actuator (double acting) Feedthrough: Shaft feedthrough, Vakuum Sealing technology: MONOVAT-System Sealing materials: Bonnet: FKM (VITON®) / Gate: FKM (VITON®) Cycles until first service: 500'000 cycles Leak rate: Body: < 1 . 10-9 mbar ls-1 Valve seat: < 1 . 10-9 mbar ls-1 ID:  * 63 (2 1/2") 100 (4" ) 160 (6" ) Flange:  * ISO-F (compatible with ISO 1609 Fig.1) JIS (compatible with JIS B 2290) Actuator:  * Pneumatic with position indicator with solenoid double acting Pneumatic with position indicator no solenoid double acting Pneumatic no position indicator no solenoid double acting › Details Options Catalog pages Similar Products

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